Kinetic Monte Carlo Simulation of Dynamic Phenomena in Thin Film Growth

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Martha A. Gallivan, Richard M. Murray and David G. Goodwin
2000 Materials Research Society Spring Meeting

In this paper we describe the response of a Kinetic Monte Carlo model to time-varying growth conditions. We vary temperature and partial pressure sinusoidally and identify behavior typical of low-dimensional nonlinear systems. In particular, the frequency content of the roughness response is sensitive to the presence of steps in the surface.