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• A Design Study for Thermal Control of a CVD Reactor for YBCO  + (A reactor for the deposition of supercondu … A reactor for the deposition of superconducting \ybcolong\;thin films is modeled and</br>studied from a control perspective to determine the heat transfer dynamics of the reactor</br>under active thermal control. A nonlinear wavelength-dependent heat transfer model is</br>developed to predict reactor heat transfer throughout the film growth process, and</br>preliminary component testing is conducted to validate the model. The model is linearized</br>about a typical operating point and analyzed with linear feedback control methods to</br>determine the performance of the reactor under observer-based feedback control with film</br>growth disturbances. The controller and observer are selected through linear quadratic</br>regulator and linear quadratic estimator methods. Rates of convergence of the controller</br>and observer are determined through examination of the eigenvalues of the linearized</br>system, and disturbance rejection is assessed with ${\mathcal H}_2$ and ${\mathcal</br>H}_\infty$ norms. The eigenvalue and norm analysis is applied to varying reactor design</br>parameters to quantify performance tradeoffs. The maximum errors associated with control</br>and with estimation of a nominal design case are both 21 K, and the longest time scales</br>are 45 seconds and 10 seconds for the controller and observer, respectively.the controller and observer, respectively.)

• A Design Study for Thermal Control of a CVD Reactor for YBCO  +